Editorial Board
Nguyen Toan
Tohoku University, Japan · Japan
Editorial leadership for Journal of Advances in Nanotechnology ISSN 2689-2855
Research interests
- Nanoelectromechanical Systems (Nems) Microelectromechanical Systems (Mems)
Biography
Publications:
- Fabrication of High Aspect Ratio SiO2 and Tempax Glass Pillar Structures and Its Application for Optical Modulator Device.
- Mechanical quality factor enhancement in silicon micromechanical resonator by low-damage process using neutral beam etching technology.
- A capacitive silicon resonator with a movable electrode structure for gap width reduction.
- Fabrication of an hermetically packaged silicon resonator on LTCC substrate.
- Fabrication and packaging process of silicon resonators capable of the integration of LSI for application of timing device.
- A Long Bar Type Silicon Resonator with a High Quality Factor.
- Fabrication and evaluation of silicon micromechanical resonator using neutral beam etching technology.
- Fabrication of nano-gap structures based on plastic deformation of strained Si springs by stiction effects.
- Fabrication of Vacuum-Sealed Capacitive Micromachined Ultrasonic Transducer Arrays Using Glass Reflow Process.
- Single and Mechanically Coupled Capacitive Silicon Nanomechanical Resonators.
Selected publications
- Synthesis and Evaluation of Thick Films of Electrochemically Deposited Bi2Te3 and Sb2Te3 Thermoelectric Materials 2017 cited 57×
- Fabrication ofπ-type flexible thermoelectric generators using an electrochemical deposition method for thermal energy harvesting applications at room temperature 2017 cited 47×
- Thermoelectric generators for heat harvesting: From material synthesis to device fabrication 2020 cited 46×
- High-performance flexible thermoelectric generator for self-powered wireless BLE sensing systems 2022 cited 35×
- Ultra-flexible thermoelectric generator based on silicone rubber sheet and electrodeposited thermoelectric material for waste heat harvesting 2022 cited 34×
- An Investigation of Processes for Glass Micromachining 2016 cited 32×
Ranked by citation impact (Crossref) where available, newest otherwise · verified via ORCID.
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This journal is guided by Nguyen Toan (Tohoku University, Japan) and a peer-review board of practising researchers. Open access, author-retained copyright (CC BY), and a clear editorial process.